PVD Materials for
Thin Films Industries
ISO 9001 Certified
Material
Symbol
Purity (%)
Planar (P),
Rotatable (R),
Evaporation (E)
Aluminum
Al
99.9-99.999
P, R, E
Aluminum Doped Zinc Oxide
AZO
99.95-99.99
P, R, E
Aluminum Oxide (Alumina)
Al2O3
99.9-99.99
P
Boron Carbide
B4C
99.5
P
Boron Nitride
BN
99.9
P
Cadmium Stannate
Cd2SnO4
99.99
P
Cadmium Sulfide
CdS
99.995
P, E
Cadmium Telluride
CdTe
99.99-99.999
P, E
Cerium Oxide
CeO2
99.9
P
Chromium
Cr
99-99.5
P, R, E
Copper Gallium
CuGa
99.99-99.999
P, R, E
Copper Indium Gallium
CIG
99.99-99.999
P, R, E
Copper Selenide
Cu2Se
99.99
P, E
Gallium Selenide
Ga2Se3
99.99
P, E
Germanium
Ge
99.99-99.999
P, E
Hafnium Oxide
HfO2
99.99
P
Indium
In
99.99-99.999
P, R, E
Indium Oxide
In2O3
99.99
P, E
Indium Selenide
In2Se3
99.99
P, E
Indium Tin
In/Sn
99.9-99.99
P, R, E
Indium Tin Oxide
ITO
99.99
P, R, E
Indium Titanium Oxide
ITiO
99.99-99.999
P, R, E
Indium Zinc
In/Zn
99.99
P, E
Indium Zinc Oxide
IZO
99.99
P, E
Magnesium Flouride
MgF2
99.99
P, E
Magnesium Oxide
MgO
99.9-99.95
P, E
Molybdenum
Mo
99.95
P, R, E
Molybdenum Sodium
Mo/Na
99.95
P, R
Molybdenum Sulfide
MoS2
99.9
P, E
Nickel Chromium
Ni/Cr
99.7-99.95
P, R, E
Nickel Vanadium
Ni/V
99.9-99.95
P, R
Niobium
Nb
99.9-99.98
P, R, E
Niobium Pentoxide
Nb2O5
99.95-99.99
P, E
Scandium Oxide
Sc2O3
99.9-99.99
P
Silicon (poly or monocrystalline)
Si
99.999
P, R
Silicon Aluminum
SiAl
99.8-99.995
P, R
Silicon Carbide
SiC
99.5
P, E
Silicon Dioxide
SiO2
99.99-99.995
P, E
Silicon Monoxide
SiO
99.9-99.95
P, E
Silicon Nitride
Si3N4
99.5
P
Tantalum
Ta
99.9-99.99
P, R
Tantalum Pentoxide
Ta2O5
99.99
P, E
Tin
Sn
99.9-99.999
P, R
Tin Oxide
SnO2
99.9-99.99
P
Titanium
Ti
99.7-99.999
P, R, E
Titanium Aluminum
TiAl
99.8-99.99
P, R, E
Titanium Carbide
TiC
99.5
P
Titanium Diboride
TiB2
99.5-99.9
P, R
Titanium Oxide
TiOx
99.9-99.99
P, R, E
Tungsten
W
99.95
P, R, E
Tungsten Carbide
WC
99.5-99.95
P
Tungsten Oxide
WO3
99.9-99.99
P
Vanadium
V
99.5-99.9
P
Yttrium Oxide
Y2O3
99.9-99.99
P, E
Yttrium Doped Zirconium Oxide
YSZ
99.9-99.95
P, E
Zinc Gallium Oxide
ZGO
99.9-99.99
P
Zinc Aluminum
ZnAl
99.9-99.999
P, R
Zinc Oxide
ZnO
99.9-99.999
P, R, E
Zinc Selenide
ZnSe
99.9-99.99
P, E
Zinc Sulfide
ZnS
99.9-99.99
P, E
Zinc Tin
ZnSn
99.9
P, R
Zirconium
Zr
99.5-99.9
P, R, E
Zirconium Oxide
ZrO2
99.5-99.99
P, E
Standard Materials

ProTech Materials offers a wide variety of thin film materials for the wear resistant/decorative
coating, glass coating, display, optical coating and thin film photovoltaic solar industries.

We have materials that can be formed into evaporation pellets or pieces, planar targets and
rotatable targets.  The table below outlines our common materials, the purity ranges and forms
offered.  In addition, we can supply custom engineered metal alloys or ceramics for customer's
non-standard requirements.

In addition, ProTech Materials offers backing plates for planar targets, backing tubes for rotatable
and bonding services for both.
Phone: (650) 619-9788
Email:Sales@protechmaterials.com